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steven0461 comments on FAI FAQ draft: What is nanotechnology? - Less Wrong
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I think it's in Chapter 12 of Drexler's Nanosystems, which may be worth citing regardless. ETA: or to read about it online, Chapter 11 of his MIT dissertation linked at the top.
Yes, that's where I got the figure (the printed book). The opening chapter lists a bunch of other figures of merit for other applications (strength of materials, power density, etc.)